JPH01110061U - - Google Patents
Info
- Publication number
- JPH01110061U JPH01110061U JP519288U JP519288U JPH01110061U JP H01110061 U JPH01110061 U JP H01110061U JP 519288 U JP519288 U JP 519288U JP 519288 U JP519288 U JP 519288U JP H01110061 U JPH01110061 U JP H01110061U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- polishing
- plate
- forming
- inclined surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 15
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 7
- 239000004744 fabric Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP519288U JPH01110061U (en]) | 1988-01-19 | 1988-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP519288U JPH01110061U (en]) | 1988-01-19 | 1988-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01110061U true JPH01110061U (en]) | 1989-07-25 |
Family
ID=31208355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP519288U Pending JPH01110061U (en]) | 1988-01-19 | 1988-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01110061U (en]) |
-
1988
- 1988-01-19 JP JP519288U patent/JPH01110061U/ja active Pending